Synthesis of zinc oxide nanoparticles via laser ablation on porous silicon for gas sensors application

Feb 1, 2025

Journal Journal of optics

Publisher Springer Nature Singapore

DOI https://doi.org/10.1007/s12596-025-02531-y

Zinc Oxide nanoparticles (ZnO NPs) were prepared using a pulsed laser ablation process, using Q-switched Nd: YAG laser pulses of 1064 nm wavelength, 1 Hz pulse repetition rate, pulse duration of 9 ns, with different laser pulse energy (350 mJ, 500 mJ, 650 mJ), and the porous silicon prepared by electrochemical etching with fixed parameters (25% HF, current density of 15 mA/cm 2 for 10 min). The X-ray diffraction test shows a broadening diffraction peak of the PS as a decrease in the crystallite size. The sharp peaks of the ZnO NPs refer to the high orientation of ZnO NPs along the c-axis vertical to the PS layer. FE-SEM shows a highly porous surface with a uniform distribution of holes on the silicon surface. Increasing the value of laser energy leads to larger particle sizes and more spherical, homogeneous, and broad size distribution. The examination of optical characteristics revealed that the ZnO NPs have a …

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